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发明名称
DEVICE AND METHOD FOR SUBSTRATE WASHING
摘要
申请公布号
JPH0884967(A)
申请公布日期
1996.04.02
申请号
JP19940221658
申请日期
1994.09.16
申请人
FUJITSU LTD
发明人
INOUE SHIGERU
分类号
B08B3/10;H01L21/304;(IPC1-7):B08B3/10
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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