| 摘要 |
An electrode for supporting a sample in a scanning electron microscope comprises a body (10) having means (11) for mounting the electrode in the microscope, and a flat filter element (17) mounted to said body and covering a flat surface (14) of the body. The body forms a passageway (12, 13) opening in said surface of the body, for sucking air through said filter element and collecting particles, if any, entrained into the air, on the surface of the filter element. The opening of said passageway in said surface of the body is limited to a central area of the surface, and the filter element extends over and around said area. <IMAGE> |
