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发明名称
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申请公布号
JPH0834179(B2)
申请公布日期
1996.03.29
申请号
JP19880226548
申请日期
1988.09.12
申请人
发明人
分类号
H01L21/20;H01L21/263;(IPC1-7):H01L21/20
主分类号
H01L21/20
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