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发明名称
UNDER LAYERS HEATING DEVICE IN THE DEPOSITING PROCESSES OF THE THIN LAYERS
摘要
申请公布号
RO110707(B1)
申请公布日期
1996.03.29
申请号
RO19940000803
申请日期
1994.05.17
申请人
INSTITUTUL DE OPTOELECTRONICA SA, MAGURELE, BUCURESTI
发明人
MANEA STEFAN ADRIAN;GRIGORESCU CRISTIANA EUGENIA ANA;MEDIANU VICTOR RARES;LAZARESCU MIHAIL FLORIN
分类号
C30B25/10;(IPC1-7):C30B25/10
主分类号
C30B25/10
代理机构
代理人
主权项
地址
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