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发明名称
摘要
申请公布号
JPH0834196(B2)
申请公布日期
1996.03.29
申请号
JP19890097936
申请日期
1989.04.17
申请人
发明人
分类号
H01L21/3205;H01L21/28;H01L21/285;(IPC1-7):H01L21/285;H01L21/320
主分类号
H01L21/3205
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