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发明名称
摘要
申请公布号
JPH0834428(B2)
申请公布日期
1996.03.29
申请号
JP19890096781
申请日期
1989.04.17
申请人
SEIKO INSTR & ELECTRONICS
发明人
SHIMODA SADAYUKI
分类号
H01L21/8238;H01L27/092;H03K3/353;H03K5/08;H03K19/0185;(IPC1-7):H03K19/018;H01L21/823
主分类号
H01L21/8238
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