Halbleiterstrukturen mit vorteilhaften Hochfrequenzeigenschaften sowie Verfahren zur Herstelung derartiger Halbleiterstrukturen
摘要
A process for producing a semiconductor structure with a highly conductive buried layer with the steps: application of an insulating layer (22) to a first surface of a first semiconductor substrate (23); application of an insulating layer (29) on a surface of a layer (28) of highly conductive material which is physically separate from the first semiconductor substrate; and bonding the two insulation layers.
申请公布号
DE4433330(A1)
申请公布日期
1996.03.28
申请号
DE19944433330
申请日期
1994.09.19
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE
发明人
PLETTNER, ANDREAS, 82340 FELDAFING, DE;HABERGER, KARL, 82152 PLANEGG, DE