发明名称 Halbleiterstrukturen mit vorteilhaften Hochfrequenzeigenschaften sowie Verfahren zur Herstelung derartiger Halbleiterstrukturen
摘要 A process for producing a semiconductor structure with a highly conductive buried layer with the steps: application of an insulating layer (22) to a first surface of a first semiconductor substrate (23); application of an insulating layer (29) on a surface of a layer (28) of highly conductive material which is physically separate from the first semiconductor substrate; and bonding the two insulation layers.
申请公布号 DE4433330(A1) 申请公布日期 1996.03.28
申请号 DE19944433330 申请日期 1994.09.19
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE 发明人 PLETTNER, ANDREAS, 82340 FELDAFING, DE;HABERGER, KARL, 82152 PLANEGG, DE
分类号 H01L21/20;H01L21/762;(IPC1-7):H01L21/316;H01L21/98;H01L21/320;H01P3/08;H05K9/00;H01L21/768;H01L23/522;H01L21/86;H01L21/74;H01L21/302;H01L21/30 主分类号 H01L21/20
代理机构 代理人
主权项
地址