发明名称 Halbleiter-Druckaufnahmevorrichtung
摘要 A semiconductor pressure-detecting apparatus includes a semiconductor chip having a diaphragm and a frame molded within a resin with the diaphragm exposed. A reference pressure chamber may be provided between the diaphragm and the frame. Since the diaphragm is exposed, a medium, the pressure of which is to be measured, easily contacts the diaphragm. Therefore, if the stem is connected to a case containing the medium, a high pressure can be measured.
申请公布号 DE4201634(C2) 申请公布日期 1996.03.28
申请号 DE19924201634 申请日期 1992.01.22
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 ARAKI, TORU, ITAMI, HYOGO, JP
分类号 G01L9/04;G01L9/00;H01L29/84 主分类号 G01L9/04
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