发明名称 |
Halbleiter-Druckaufnahmevorrichtung |
摘要 |
A semiconductor pressure-detecting apparatus includes a semiconductor chip having a diaphragm and a frame molded within a resin with the diaphragm exposed. A reference pressure chamber may be provided between the diaphragm and the frame. Since the diaphragm is exposed, a medium, the pressure of which is to be measured, easily contacts the diaphragm. Therefore, if the stem is connected to a case containing the medium, a high pressure can be measured. |
申请公布号 |
DE4201634(C2) |
申请公布日期 |
1996.03.28 |
申请号 |
DE19924201634 |
申请日期 |
1992.01.22 |
申请人 |
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP |
发明人 |
ARAKI, TORU, ITAMI, HYOGO, JP |
分类号 |
G01L9/04;G01L9/00;H01L29/84 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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