摘要 |
An electrically conductive heating element consists of an electrically insulated, heat-conductive base (1) and an electrically conductive coating (2) applied thereto to act as a heat source. The plate (1) is plate-shaped and solid, thus being suitable as a heat sink, and can transfer the heat generated directly to the object to be heated. The base (1) preferably consists of silicon nitride or silicon carbide and the electrically conductive layer consists of polycrystalline or amorphous doped silicon or a metal coating. |