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发明名称
Method and cell for etching semiconductors
摘要
申请公布号
GB2261677(B)
申请公布日期
1996.03.27
申请号
GB19910024867
申请日期
1991.11.22
申请人
* THE UNIVERSITY OF SOUTHAMPTON
发明人
LEONARD EVARISTE * BERLOUIS;DAVID JORGE * SCHIFFRIN;LAURENCE MICHAEL * PETER;MICHAEL GEORGE * ASTLES;NEAL THOMSON * GORDON
分类号
C25F3/12;H01L21/465;(IPC1-7):C25F3/12
主分类号
C25F3/12
代理机构
代理人
主权项
地址
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