A fast atom beam source,申请号EP19910114476-传众专利搜索

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发明名称	A fast atom beam source
摘要
申请公布号	EP0475199(B1)	申请公布日期	1996.03.27
申请号	EP19910114476	申请日期	1991.08.28
申请人	EBARA CORPORATION	发明人	NAGAI, KAZUTOSHI;ITOH, KANICHI
分类号	G21K5/00;H01J37/06;H01J37/08;H05H3/02;(IPC1-7):H05H3/00	主分类号	G21K5/00
代理机构		代理人
主权项
地址

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