发明名称 Apparatus for the controlled cooling of chemical tanks
摘要 An apparatus for the controlled cooling of chemical tanks containing a chemical solution (4) which must be kept at a first prescribed temperature (T1) comprises at least one heat-exchanger coil (1,2) immersed inside of a chemical tank (3) and through which there is made to circulate a flow of an inert gas (23); the apparatus comprises storage means (50-53) for storing and cooling a prescribed volume of inert gas (23) at a second prescribed temperature lower than the first prescribed temperature (T1), feeding means (56-58) for feeding the storage means (50-53) with inert gas (23) coming from a main supply line (55), and valve means (62,65,63,66) interposed between the storage means (50-53) and an inlet (I1,I2) of the at least one heat-exchanger coil (1,2) for controlling the supply of cooled inert gas (23) to the heat-exchanger coil (1,2). <IMAGE>
申请公布号 EP0703604(A1) 申请公布日期 1996.03.27
申请号 EP19940830440 申请日期 1994.09.20
申请人 CONSORZIO PER LA RICERCA SULLA MICROELETTRONICA NEL MEZZOGIORNO - CORIMME 发明人 FALZONE, ALBERTO
分类号 H01L21/00 主分类号 H01L21/00
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