| 摘要 |
A mask and a mask supporting mechanism are disclosed wherein the outside periphery of a mask frame of the mask, of rectangular shape, is supported at three supporting points which are at substantially the same distance from the center line of a mask membrane, whereby the mask frame is positioned with respect to X, Y and theta directions. Two pressing mechanisms presses the mask frame at two points substantially opposed to two of the supporting points. As regards the positioning of the mask frame in Z direction, it is supported at three points on the bottom surface thereof. <IMAGE> |
