PROCESS AND ARRANGEMENT FOR STABILISING AN ELECTRON-BEAM VAPORISATION PROCESS,申请号EP19930918892-传众专利搜索

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发明名称	PROCESS AND ARRANGEMENT FOR STABILISING AN ELECTRON-BEAM VAPORISATION PROCESS
摘要
申请公布号	EP0664839(B1)	申请公布日期	1996.03.27
申请号	EP19930918892	申请日期	1993.08.18
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	KIRCHHOF, VOLKER;METZNER, CHRISTOPH;GOEDICKE, KLAUS;SCHILLER, SIEGFRIED;KERN, HEINZ
分类号	C23C14/54;C23C14/30;(IPC1-7):C23C14/54	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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