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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0883809(A)
申请公布日期
1996.03.26
申请号
JP19940217513
申请日期
1994.09.12
申请人
MURATA MFG CO LTD
发明人
YOSHIDA KAZUHIRO
分类号
H01L29/812;H01L21/027;H01L21/285;H01L21/338;(IPC1-7):H01L21/338
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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