| 摘要 |
PURPOSE: To obtain a sufficiently dense AlN sintered compact, having a high thermal conductivity regardless of a low sintering temperature and no recognizable irregular color and uneven baking due to exudation of a grain boundary phase on the surface of the resultant sintered compact without causing warpage or waviness and excellent in cleanliness and smoothness of the surface of the sintered compact. CONSTITUTION: This method for producing an aluminum nitride sintered compact is to add (a) at least one of rare earth oxides or compounds convertible into the rare earth oxides by baking and (b) at least one of alkaline earth oxides or compounds convertible into the alkaline earth oxides by baking to an aluminum powder, further add (c) at least one selected from rare earth halides, rare earth acid halides and alkaline earth halides in an amount of <=1.5wt.% based on the whole to the resultant mixture, mix the components so as to provide >=0.03 to <=0.3 weight ratio of the halogen based on oxygen and bake the resultant raw material powder. |
