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发明名称
PROCESSING EQUIPMENT
摘要
申请公布号
JPH0883833(A)
申请公布日期
1996.03.26
申请号
JP19940244823
申请日期
1994.09.13
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
MIZOZAKI KENGO
分类号
B65G49/07;H01L21/027;H01L21/67;H01L21/673;H01L21/677;H01L21/683;(IPC1-7):H01L21/68
主分类号
B65G49/07
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