发明名称 |
Micropolarimeter, microsensor system and method of characterizing thin films |
摘要 |
A micropolarimeter comprises an analyzer (1) and a detector (3), which is typically a photodetector array. The detector has a circular configuration of a number N of sectors. Analyzer (1) and detector (3) form a unit with the analyzer assigning different polarization values to the sectors. Analyzer and the detector contain no moving parts. Three different embodiments are proposed for the analyzer: a glass cone, covered with a polarizing thin film stack, a metal grid polarizing array, and an array of polarizing waveguides. The micropolarimeter (14) is used preferably in a microellipsometer system which can serve as a tool for film diagnostics, especially optical characterization of thin films.
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申请公布号 |
US5502567(A) |
申请公布日期 |
1996.03.26 |
申请号 |
US19940268149 |
申请日期 |
1994.06.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;IMM INST MIKROTECH |
发明人 |
POKROWSKY, PETER;KIEFER, ECKEHARD;ABRAHAM, MICHAEL;STENKAMP, BERND;EHRFELD, WOLFGANG;ZETTERER, THOMAS |
分类号 |
G01J4/04;G01N21/21;(IPC1-7):G01J4/00 |
主分类号 |
G01J4/04 |
代理机构 |
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