发明名称 Method for gettering noble metals from mineral acid solution
摘要 Silicon is employed as a reducing agent in an acid bath to adsorb noble metals present as contaminants in the acid. In the manufacture of silicon devices for electronic memory and other devices, polonium-210 is adsorbed by silicon getters to reduce soft error rate attributable to alpha particle emissions from the radioactive polonium. The noble metals in addition to polonium which can be plated onto silicon using the disclosed method are gold, silver, platinum, copper, palladium, mercury, selenium and bismuth.
申请公布号 US5501767(A) 申请公布日期 1996.03.26
申请号 US19920975789 申请日期 1992.11.13
申请人 MICRON TECHNOLOGY, INC. 发明人 SORENSEN, TROY;GRIEGER, ERIC
分类号 B01D39/14;C02F1/62;C22B3/44;C22B61/00;G21F9/04;G21F9/12;H01L21/306;H01L23/556;(IPC1-7):H01L21/00 主分类号 B01D39/14
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