| 摘要 |
<p>PURPOSE: To suppress the unevenness of an electric capacity by providing a lower electrode provided on a board, a first insulating film provided on the electrode, a second insulating film provided on the side of the lower electrode and thinner than the thickness of the insulating film, and an upper electrode so provided as to be superposed from both sides of the lower electrode on the upper part. CONSTITUTION: A lower electrode 2 made of a tantalum film is provided on a board 1, a first insulating film 3 is provided on the upper surface, and a second insulating film 4 is provided on the side in such a manner that the thickness of the film 3 is thicker than the thickness of the film 4. Further, an upper electrode 5 made of a tin indium oxide is so provided as to cover the upper surface and the side of the electrode 2. In this case, the film 3 is formed of a silicon nitride film, and the film 4 is formed of a tantalum oxide film. Thus, even if the alignment at the time of patterning the upper electrode is deviated, the electric capacity value can be held constant, and the deterioration of the display quality of a liquid crystal display unit can be suppressed.</p> |
