发明名称 BIPOLAR ELECTRODE WIRING METHOD USING POLYSILICON
摘要 The wiring method of a bipolar electrode in the mfr. of a semiconductor device is characterized by (a) forming a n-type impurity-doped polysilicon on the surface of a base region(5), and removing the polysilicon except of an emitter region to form a emitter polyelectrode wire(8), (b) diffusing the n-type impurity of the wire(8) to form an emitter(6) under the wire(8), and forming an oxide film(9) on the surface of wire(8) and the base region(5), and (c) removing the oxide film(9) except of the wire region(8), and depositing a metal on the surface of the film(9) and the base region(5) to form a base metal wire(10).
申请公布号 KR960004094(B1) 申请公布日期 1996.03.26
申请号 KR19880001480 申请日期 1988.02.15
申请人 LG SEMICONDUCTOR CO., LTD. 发明人 PARK, MYUNG - DUK
分类号 H01L21/768;(IPC1-7):H01L21/768 主分类号 H01L21/768
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