| 摘要 |
PURPOSE: To provide the subject device in which the pipings for feeding stock gas, combustion gas and sealing gas are respectively connected to a burner and opened toward the inside of a reaction vessel to prevent the back-flow of a corrosive gas retaining inside the reaction vessel through the pipings as a cause of the corrosion of the pipings and a gas flow control valve. CONSTITUTION: An inert gas feed piping 24 is made to communicate with the pipings 5-8 for respectively feeding stock gas, combustion gas and sealing gas, and on-off valves 25-28 are provided midways of the piping 24; these valves 25-28 are opened according to the feed halts of the respective gases to purge the insides of the pipings 5-8 with an inert gas. |
