| 摘要 |
PURPOSE: To provide an X-ray generator stably used for a long time with reduced adherence and deposition of scattered particles by controlling directional distribution of discharging quantity of the scattered particles discharged from a target member or plasma. CONSTITUTION: YAG laser beams 311 are condensed onto a surface of a Ta target 303 through a condenser lens 312. A Ta tape is interposed between a target holding member 302 and a scattered particle control member 301 so as to prevent displacement of plasma to be an X-ray source even when the Ta target is moved. The scattered particle control member 301 is fixed and the target holding member 302 is pressed to the member 301 by means of a spring member. Because of the scattered particle control member 301, an X-ray radiation quantity in the X-ray take-out direction is not reduced, while a scattered particle discharging quantity is concentrated in the normal line direction to a laser beam condensing position on the Ta tape and a scattered quantity in the 45-degree direction is reduced to a fraction thereof. Therefore, the scattered particles adhered and deposited onto a filter 315 are reduced. |
