METHOD FOR MAKING THE MASS OF ACCELERATION SENSOR AND VIBRATION SENSOR USING METAL PASTE DISPENSING

摘要

The method involves forming a pressure resistor(2) on a Si wafer(1) after cleaning it. Then vacuum deposition of Ni thin film(3) as a mass paddle are formed over the Si wafer. The patterning of the Ni thin film(3) is carried out by wet etching, and a heat treatment is carried out to form Ni silicide(3'). The Ni surface oxide layer is removed in NH4OH aq. solution. A metal paste(4) of fixed quantity is formed over the Ni silicide(3') using a dispenser, and is heat treated and stiffened. The method facilitates mass production, and manufacture of various sensors with differing weights.