| 摘要 |
PURPOSE: To make an acceleration sensor compact and able to enlarge its maximum tolerable acceleration by dividing each of a movable electrode part and a fixed electrode part into a plurality of parts along a displacement direction of the movable electrode part. CONSTITUTION: The confronting area of a movable electrode 1 and a fixed electrode 2 in a state without an acceleration impressed is set to be SO. Width of each of the movable electrode 1 and the fixed electrode 2 is set to be We, and a displacement amount of a movable part 16 when a detection rated acceleration Ar is impressed to the acceleration sensor is set to be dr. In this case, a changing amountΔS of the confronting area of the movable electrode 1 and fixed electrode 2 is expressed by S=dr/We. In other words, the changing amountΔS of the confronting area is proportional to a changing amount of an electrostatic capacity of a capacity element between the electrodes 1 and 2. Therefore, if the dividing number of the movable electrode 1 and fixed electrode 2 is increased and the width We of each electrode is approximated to the displacement amount dr when the rated acceleration Ar is impressed to the movable part 16, the changing amount of the electrostatic capacity of the capacity element is increased.
|
