发明名称 CURE EQUIPMENT
摘要 PURPOSE: To efficiently perform, in a short time, a work for eliminating a specimen when imperfect carriage of the specimen is generated, an exchanging work of a carrying wire when the carrying wire is cut, a cleaning work of the carrying wire and a heat block, and so on. CONSTITUTION: The title cure equipment is provided with a casing 4 for a specimen heating chamber in which a plurality of heat blocks for heating the specimen are installed, and a casing 5 for a gas supplying chamber which is arranged on the casing 4 for a specimen heating chamber and supplies high temperature gas on the heat blocks through gas supplying slits of gas supplying slits forming boards which are formed so as to correspond with the heat blocks. The casing 5 for a gas supplying chamber is constituted so as to be freely opened and closed for the casing 4 for a specimen heating chamber.
申请公布号 JPH0878443(A) 申请公布日期 1996.03.22
申请号 JP19940235895 申请日期 1994.09.05
申请人 SHINKAWA LTD 发明人 ARAI MITSUO;SUGANUMA TOSHIHARU
分类号 H01L21/52;F26B3/00;F26B3/20;F26B15/12;(IPC1-7):H01L21/52 主分类号 H01L21/52
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