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发明名称
REACTION TREATMENT APPARATUS
摘要
申请公布号
JPH0878336(A)
申请公布日期
1996.03.22
申请号
JP19940215433
申请日期
1994.09.09
申请人
HITACHI LTD
发明人
SAKAKI SHIGEO;SATO AKIHIKO
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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