| 摘要 |
PURPOSE: To make it possible to remove pellicles without damaging the reticles and without adhering foreign matter thereto by providing the above device with means for removing pellicle film from reticles, means for removing pellicle frames from the reticles, etc. CONSTITUTION: A computer 3 for controlling device controls respective removing devices 4, 5, etc., according to received parameters. The device has a library section for housing the reticles to be processed, a pellicle film removing section 4 for sucking and removing only the pellicle films from the reticles and a pellicle frame removing section 5 for peeling and removing the pellicle frames from which the pellicle films are removed. For example, the pellicle films are sucked away in the pellicle film removing section 5. For example, the adhesive regions between the reticles and the pellicle frames are irradiated with UV rays to soften and dissolve the adhesives and thereafter, the pellicle frames are peeled from the reticles in the pellicle frame removing section 5. |
