| 摘要 |
PURPOSE: To reduce the decrease in intensity of X rays by shortening the distance, wherein the X rays emitted from an X-ray source passes the air and reaches a sample. CONSTITUTION: The X rays from an X-ray source 5 are cast on a sample 6. The diffracted X rays from the sample 6 are measured with a counter 4. During this period, the sample is rotated by a quadruple shaft goniometer 3, and the diffracted X rays are counted with the counter 4. That is to say, the counter is turned around a 2Θshafts 35 on a base stage 11, which intersects an optical axis C of the X rays at a right angle. A κ case 12 is turned on an Ωshaft 32 on the base stage 11. The κ case 12 and the counter 4 are turned so that the speed ratio of 1:2 is always obtained. Furthermore, a ϕ case 13 is turned on a K shaft 33 provided in the κ case 12. The sample 6 is turned on a Φ shaft 34 of the ϕ case 13. Thus, the X rays are cast on the measuring surface of the sample at various angles. The K shaft 33 is supported on the κ case 12 with a thin-type bearing 36 so that the shaft 33 is freely turned. Thus, the κcase 12 is made to have the thin-type shape, and the X-ray source 5 can be brought closer to the sample 6 by that amount. |
