| 摘要 |
<p>PURPOSE: To obtain a positioning controller in which countermeasures are taken against runaway such that the runaway of a mover can be detected even if it is caused by abnormality of command value itself and the mover is stopped at a safety deceleration causing no damage on the mover. CONSTITUTION: The positioning controller 2, 3, 4, 5, 7, 8, 9 for positioning a mover 1 at a target position through feedback control of drive means 9, 3 comprises means 10, 11 for detecting abnormal movement of the mover, and a servo means 12 for emergency stopping the drive means in response to a detection signal from the detection means 10, 11.</p> |
