| 摘要 |
<p>PURPOSE: To provide a semiconductor acceleration sensor which greatly improves detecting sensitivity at self-diagnosis time and has high reliability. CONSTITUTION: A mass part 29 is set in a semiconductor substrate 25. The sensor is provided with an acceleration-detecting part 1 which detects an acceleration from a stress generated as a result of the acceleration impressed to the mass part 29, and a self-diagnosing part which diagnoses whether the acceleration-detecting part 1 operates normally. The self-diagnosing part is equipped with a differential amplifier circuit 3 which differentiates and amplifies a change of potential caused when the mass part 29 is shifted because of the potential applied to the acceleration-detecting part 1, and a signal-holding circuit 5 which holds outputs of the differential amplifier circuit 3.</p> |
