| 摘要 |
<p>PURPOSE: To expand the detection range of a pressure sensor by preventing the short-circuiting between a movable electrode and a fixed electrode. CONSTITUTION: Frames 1 made of silicon, where a support substrate 4 made of silicon, a cover 3 made of glass, and a thin-film diaphragm 2 are supported, are overlapped and they are subjected to anode joint. A pressure room 11 is provided between the frame 1 and the cover 3 and a gas pressure is introduced to the lower surface of the diaphragm 2 from a pressure introduction entrance 10 which is opened at the support substrate 4 and the cover 3. Even if a large gas pressure is introduced, the movable electrode does not contact the fixed electrode, thus preventing short-circuiting. Also, a gap can be reduced, thus increasing the electrostatic capacitance output and improving sensitivity.</p> |
