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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0878518(A)
申请公布日期
1996.03.22
申请号
JP19940232277
申请日期
1994.09.01
申请人
NIPPON STEEL CORP
发明人
NAGANUMA TAKESHI
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
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