| 摘要 |
PROBLEM TO BE SOLVED: To provide a suspension device and an acceleration sensor in which the temperature dependability of a measurement signal can be reduced for enhancing accuracy. SOLUTION: In a suspension device in which a micromachine is fixed to a base plate 1 through at least two fixing members 7, at least one lever member 6 is provided, and one side of the lever member 6 is fixed to one side of the fixing member 7. The other side of the lever member 6 forms a first working point 16, and a micromachine structure is fixed to the first working point; on the other hand, a compensating beam 8 is provided, and the compensating beam 8 acts on a second working point 15 of the lever member, so that the deflection of the lever member 6 can be enabled by the tension of the compensating beam 8. |
