发明名称 TWO-DIMENSIONAL DIFFERENTIAL INTERFERENCE MEASURING DEVICE
摘要 PURPOSE: To independently observe differential shapes in two directions with different wavelengths by forming object images with the light passing through a polarizer and a wavelength plate, illuminating an observed object, and passing through an optical element separating the incident light into two light beams, the wavelength plate, and a sensitive color plate. CONSTITUTION: The illumination mixed with the light from a He-Cd laser light source 1 and the light from a red semiconductor laser light source 2 by a half mirror 3 becomes the linearly polarized light in the direction of the angleθagainst the X-axis 6 by a polarizer 5, and it becomes an elliptically polarized light after passing through aλ/4 plate 7. The reflected light folded by a half mirror 8 and reflected on the surface of an object 10 proceeds in the direction of the Z-axis 12, and it passes through the half mirror 8 and reaches a Savart plate 13. The light from the light source 1 passes through a sensitive color plate 17, a Savart plate 18, and an analyzer 21 and forms the images of the object 10 on image pickup elements 24, 25 via an image forming lens 22 and a half mirror 23. The reflected light from the light source 2 maintains the electric field component as it is after passing through the sensitive color plate 17, and differential interference images are formed on the image pickup elements 24, 25 after the light passes through the Savart plate 18.
申请公布号 JPH0875407(A) 申请公布日期 1996.03.22
申请号 JP19940211006 申请日期 1994.09.05
申请人 NIPPON SHEET GLASS CO LTD 发明人 IKEDA MAKOTO
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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