| 摘要 |
<p>PURPOSE: To provide a transfer device, which is capable of ensuring an object of very flexible transfer and markedly reducing adverse effects on reliability and clean room conditions, even if a transfer path is long. CONSTITUTION: An electrical connection between a sensor, an actuator, and a feed unit 10 provided to the stationary part of a drive device 7, which is used for transfer, is exclusively made at two end positions to control the operation of the sensor and the actuator located above the movable part of the drive device 7. A transfer device is used, for instance, for loading an object in a semiconductor processing device in a semiconductor manufacturing process, but the use of the device is not limited to the above field.</p> |
