发明名称 Method and apparatus for calibrating a laser wavelength control mechanism
摘要 Calibration of a wavelength adjustment mechanism of a laser is achieved using a hollow cathode absorption lamp. The lamp is provided with a vaporous material having a precisely known wavelength of maximum absorption. A photo-detector detects the amount of light from the laser beam absorbed by the vaporous material as a function of wavelength. The wavelength of the laser is adjusted to achieve maximum absorption such that the actual laser beam wavelength may be compared with an expected, wavelength to determine a calibration offset. The hollow cathode lamp is operated to produce a vaporous material of known absorption characteristic but is illuminated at a level substantially below a level required for conventional opto-galvanic resonance.
申请公布号 AU1252995(A) 申请公布日期 1996.03.22
申请号 AU19950012529 申请日期 1994.08.31
申请人 CYMER LASER TECHNOLOGIES 发明人 IGOR FOMENKOV
分类号 G01J3/51;G01J;G01J1/42;G01J3/12;G01J3/28;G01J9/00;H01S;H01S3/10;H01S3/13;H01S3/139;H01S3/225 主分类号 G01J3/51
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