SEMICONDUCTOR X-RAY DETECTOR AND X-RAY DETECTION DEVICE

摘要

PURPOSE: To provide a semiconductor X-ray detector which has a signal acquiring electrode in a detector surface. CONSTITUTION: An electric field is applied to a semiconductor X-ray detection part between a gate electrode 104 insulated by an insulation film 102 on a semiconductor substrate 100 wherein a p-type region 101 is formed in a rear and a rear gate electrode 105, an electron-hole pair generated by an X-ray 109 injected to the semiconductor substrate 100 is separated and an electric signal collected to a front side by an inner electric field is acquired by an electrode 106 and an electrode 107. Since an electric signal collected to a front side by an inner electric field of a detector is thereby acquired, capacity of a detector is greatly reduced and feeble X-ray can be measured at high sensitivity and high resolution.