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发明名称
WAFER CARRIER AUTOMATIC TRANSFERRING APPARATUS
摘要
申请公布号
JPH0878499(A)
申请公布日期
1996.03.22
申请号
JP19940208607
申请日期
1994.09.01
申请人
FUJITSU LTD
发明人
TAKAHASHI TAKAO
分类号
B65G49/07;B25J15/08;B25J19/00;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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