| 摘要 |
<p>PURPOSE: To shift a cassette used for processes except a process containing a pollutant source to a cassette used for the process containing the pollutant source, and to avoid the effect of cassette contamination by indicating the automatic shifting of the cassette from an aforementioned process flow to a shifted. CONSTITUTION: A process progress storage device 5 stores the progress of a process together with a cassette 2 by a bar code 8. A host computer 6 shifts the cassette 2 to a specified cassette when the cassette 2 reaches before cassette shifting operation by a cassette discrimination signal read from a bar code reader 3, a current process place from the process progress storage device 5, and next process operation information read from a process flow storage device 4. A required empty cassette is stored in a shifter 7. The cassette 2 is shifted to another cassette according to an indication.</p> |
