| 摘要 |
PURPOSE: To make a mechanical amount sensor have an air damping constitution by subjecting glass to an anodic bonding to form a sealed space, and prevent P-N junction characteristics from being deteriorated at the anodic bonding of glass. CONSTITUTION: In a piezoelectric resistance-type acceleration sensor, displacement of a weight 1a which shifts its position in accordance with an acceleration is detected by a piezoelectric resistance element 3, and a signal from the piezoelectric resistance element 3 is taken out by a p<+> diffusion layer 4. Moreover, glasses 6, 7 are anodically bonded to semiconductor substrates 1, 2 to perform air damping. At the anodic bonding, a high voltage is impressed to a bonded part between an n-type layer 2 and the p<+> diffusion layer 4, thereby PN junction characteristics of the p<+> diffusion layer 4 tend to deteriorate. For preventing this deterioration, an n<+> -type diffusion layer 12 is formed on the p<+> diffusion layer 4, so that an anodic bonding current is fed to the glass via the n<+> -type diffusion layer 12 from the n-type layer 2. |
