发明名称 COMPLEMENTARY DEVICE USING THIN FILM TRANSISTOR WITH IMPROVED ELECTRIC CURRENT DRIVING
摘要 PROBLEM TO BE SOLVED: To virtually prevent the diode effect generated by the channels of p-type and n-type devices by providing a conductive region in a complementary device. SOLUTION: A tungsten silicide layer 27 of conductive material is arranged between transistors 17 and 18, instead of an n-type polysilicon layer which has been before. The p-n junction, which is generated by the drain of the p-type transistor 17 and the polysilicon layer, can be removed by the WSi2 layer 27 using the drain of a drive transistor as the drain of a pull-down transistor, and at the same time, the formation of the p-n junction can be prevented. Accordingly, the effect of diode can be removed without substantially deviating from the ordinary manufacturing process, while the high-speed property and the high density characteristic of a TFT are being utilized.
申请公布号 JPH0878536(A) 申请公布日期 1996.03.22
申请号 JP19950221236 申请日期 1995.08.30
申请人 AT & T CORP 发明人 KUOOFUA RII;CHIYUNNTEIN RIU
分类号 H01L21/8238;H01L27/092;H01L27/11;H01L29/786;(IPC1-7):H01L21/823 主分类号 H01L21/8238
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