,申请号JP19870180295-传众专利搜索

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发明名称
摘要
申请公布号	JPH0827326(B2)	申请公布日期	1996.03.21
申请号	JP19870180295	申请日期	1987.07.20
申请人		发明人
分类号	G01R31/26;H01L21/66;(IPC1-7):G01R31/26	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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