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发明名称
摘要
申请公布号	JPH0827298(B2)	申请公布日期	1996.03.21
申请号	JP19860230388	申请日期	1986.09.29
申请人		发明人
分类号	H01L21/66;G01B7/00;G01R1/073;G01R31/28;(IPC1-7):G01R1/073	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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