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发明名称
摘要
申请公布号
JPH0828401(B2)
申请公布日期
1996.03.21
申请号
JP19870071979
申请日期
1987.03.26
申请人
发明人
分类号
H05K3/32;H01L21/60;H01L23/12;(IPC1-7):H01L21/60
主分类号
H05K3/32
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