ELECTROMECHANICAL TRANSDUCER

摘要

An electromechanical transducer is described with a moveable, flexible element (1-10) and an amplifier stage (3-7), wherein the amplifier stage is integrated into said element. The transducer further comprises piezoelectric materials (8) to generate a deflection depending signal as input signal of the amplifier stage (3-7). In a preferred embodiment, the flexible element comprises layers (1, 9) of material with different thermal expansion coefficient to enhance the sensitivity of the device as temperature sensor. The new device is applicable in local probe microscopy, such as atomic force microscopy, or as an actuator, as a (chemical) sensor, or as an oscillator.