发明名称
摘要 <p>A method is described for aligning a contact pattern on an electronic device held by a first movable support, with a bond site pattern on a lead frame held by a second movable support. The method includes the steps of: (a) creating and storing models of a chip's contact pattern and a lead frame's bond site pattern; (b) imaging the electronic device and lead frame; (c) determining the position of contacts on said electronic device and reorienting the contact pattern model to a best fit with the imaged contact position; (d) determining the position of each bond site on the imaged lead frame and reorienting the bond site model to a best fit with the imaged bond site position; (e) determining positional differences between the reoriented lead frame and contact pattern models; and (f) generating signals to reorient the first and second movable supports to minimize the positional differences when they are moved into a bonding position. A machine is described for performing the above method wherein each of three main movable elements of the machine is assigned a dimensional axis in which its travel is non-adjustable, so that other movable elements can be calibrated thereagainst. <IMAGE></p>
申请公布号 JPH0828402(B2) 申请公布日期 1996.03.21
申请号 JP19910135092 申请日期 1991.06.06
申请人 发明人
分类号 H01L21/60;H01L21/00;H01L21/66;H01L21/68;(IPC1-7):H01L21/60 主分类号 H01L21/60
代理机构 代理人
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