Verfahren zur Herstellung eines aktiven Matrixsubstrats.

摘要

Disclosed is a method for fabricating an active matrix substrate for forming constituent elements such as semiconductor layer, passivation layer, electrode material and other elements, by using a photo resist exposed from the substrate back side, using the gate electrode pattern made of opaque material on a transparent substrate as the mask. This method contributes to lower the cost and improve the performance of devices.