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发明名称
摘要
申请公布号
JPH0828350(B2)
申请公布日期
1996.03.21
申请号
JP19920329347
申请日期
1992.12.09
申请人
SAKAMOTO JUICHI;IRIE KOKEN KK;NICHIMEN KK
发明人
SAKAMOTO JUICHI
分类号
C23C14/35;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/46;(IPC1-7):H01L21/306
主分类号
C23C14/35
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