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发明名称
摘要
申请公布号	JPH0828189(B2)	申请公布日期	1996.03.21
申请号	JP19860268950	申请日期	1986.11.12
申请人		发明人
分类号	H01J27/26;H01J27/02;H01J37/08;H01L21/027;H01L21/30;(IPC1-7):H01J27/02	主分类号	H01J27/26
代理机构		代理人
主权项
地址

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